MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering

Product Description
Technology/Engineering/Mechanical

A bestselling MEMS text…now better than ever.

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.

Other highlights of the Second Edition include:
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Expanded coverage of microfabrication plus assembly and packaging technologies
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The introduction of microgyroscopes, miniature microphones, and heat pipes
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Design methodologies for thermally actuated multilayered device components
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The use of popular SU-8 polymer material

Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.

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Inorganic Nanowires: Applications, Properties, and Characterization

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Advances in nanofabrication, characterization tools, and the drive to commercialize nanotechnology products have contributed to the significant increase in research on inorganic nanowires (INWs). Yet few if any books provide the necessary comprehensive and coherent account of this important evolution.

Presenting essential information on both popular and emerging varieties, Inorganic Nanowires: Applications, Properties, and Characterization addresses the growth, characterization, and properties of nanowires. Authors Meyyappan—a NASA scientist and renowned leader in nanoscience and technology—and Sunkara—a major contributor to nanowire literature—offer an in-depth overview of various types of nanowires, including semiconducting, metallic, and oxide varieties. This book also includes extensive coverage of applications that use INWs and those with great potential in electronics, optoelectronics, field emission, thermoelectric devices, and sensors.

This invaluable reference:

• Traces the evolution of nanotechnology and classifies nanomaterials
• Describes nanowires and their potential applications to illustrate connectivity and continuity
• Discusses growth techniques, at both laboratory and commercial scales
• Evaluates the most important aspects of classical thermodynamics associated with the nucleation and growth of nanowires
• Details the development of silicon, germanium, gallium arsenide, and other materials in the form of nanowires used in electronics applications
• Explores the physical, electronic and other properties of nanowires

The explosion of nanotechnology research activities for various applications is due in large part to the advances in the growth of nanowires. Continued development of novel nanostructured materials is essential to the success of so many economic sectors, ranging from computing and communications to transportation and medicine. This volume discusses how and why nanowires are ideal candidates to replace bulk and thin film materials. It covers the principles behind device operation and then adds a detailed assessment of nanowire fabrication, performance results, and future prospects and challenges, making this book a valuable resource for scientists and engineers in just about any field.

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