Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies

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Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques — electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) — as well as on emergent techniques, such as scanning tunnelling lithography (STL).

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Artificial Muscles: Applications of Advanced Polymeric Nanocomposites

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Smart materials are the way of the future in a variety of fields, from biomedical engineering and chemistry to nanoscience, nanotechnology, and robotics. Featuring an interdisciplinary approach to smart materials and structures, Artificial Muscles: Applications of Advanced Polymeric Nanocomposites thoroughly reviews the existing knowledge of ionic polymeric conductor nanocomposites (IPCNCs), including ionic polymeric metal nanocomposites (IPMNCs) as biomimetic distributed nanosensors, nanoactuators, nanotransducers, nanorobots, artificial muscles, and electrically controllable intelligent polymeric network structures.

Authored by one of the founding fathers of the field, the book introduces fabrication and manufacturing methods of several electrically and chemically active ionic polymeric sensors, actuators, and artificial muscles, as well as a new class of electrically active polymeric nanocomposites and artificial muscles. It also describes a few apparatuses for modeling and testing various artificial muscles to show the viability of chemoactive and electroactive muscles. The authors present the theories, modeling, and numerical simulations of ionic polymeric artificial muscles’ electrodynamics and chemodynamics. In addition, they feature current industrial and medical applications of IPMNCs.

By covering the fabrication techniques of and novel developments in advanced polymeric nanocomposites, this book provides a solid foundation in the subject while stimulating further research.

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Micro and Nanomanufacturing

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Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining.

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

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Foundations of Nanomechanics: From Solid-State Theory to Device Applications

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This text provides an introduction, at the level of an advanced student in engineering or physics, to the field of nanomechanics and nanomechanical devices. It provides a unified discussion of solid mechanics, transducer applications, and sources of noise and nonlinearity in such devices. Demonstrated applications of these devices, as well as an introduction to fabrication techniques, are also discussed. The text concludes with an overview of future technologies, including the potential use of carbon nanotubes and other molecular assemblies.

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Modeling MEMS and NEMS

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Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model.Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization of micro- and nanoscale devices. After some introductory material, a review of continuum mechanics, and a study of scaling, the book is organized around phenomena. Each chapter addresses a sequence of real devices that share a common feature. The authors abstract that feature from the devices and present the mathematical tools needed to model it. They construct, analyze, and interpret a series of models of increasing complexity, then at the end of the chapter, they return to one of the devices described, apply the model to it, and interpret the analysis.In the beginning, the world of microdevices was dominated by experimental work and the development of fabrication techniques. As it matures, optimization and innovative designs are moving to the forefront. Modeling MEMS and NEMS not only provides the practical background and tools needed to design and optimize microdevices but it also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

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