Fabrication & Design of Resonant Microdevices

Product Description
This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated.

Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters.

* Offers numerous academic and industrial examples of resonant MEMS
* Provides an analytic model of device behavior
* Explains two-port systems in detail
* Devotes ample space to excitation and signal detection methods
* Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

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Mems/Nems:

Product Description

As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.

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Sensors Based on Nanostructured Materials

Product Description

“Sensors Based on Nanostructured Materials” presents the many different techniques and methods of fabricating materials on the nanometer scale, and, specifically, the utilization of these resources with regard to sensors. The techniques which are described are studied from an application-oriented perspective, providing the reader with a broader perspective of the types of nanostructured sensors available than other books which concentrate on theoretical situations related to specific fabrication techniques. Rather than focus on possible techniques for future fabrication, this book describes and explores well established techniques for fabricating sensors using nanostructured materials, and serves as a multidisciplinary text which considers the uses in optics, electronics, and biochemistry.

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Principles of Nanophotonics

Product Description
The Theory and Applications of Nanophotonics Devices, Fabrication, and Systems

Coauthored by the developer of nanophotonics, Principles of Nanophotonics outlines physically intuitive concepts of the subject using a novel theoretical framework that differs from conventional wave optics. It probes far-reaching physical insights into the local electromagnetic interaction in the nanometric subsystem composed of electrons and photons.

After reviewing the background, history, and current status of research and development in nanophotonics and related technologies, the book presents a unique theoretical model to describe the interactions among nanometric material systems via optical near-fields. It also evaluates a nonadiabatic fabrication process using this theoretical model. The authors then explore nanophotonic devices and fabrication techniques and provide examples of qualitative innovation. The final chapter looks at how the assembly of nanophotonic devices produces a nanophotonic system.

Realize the Great Potential of Nanophotonics

Nanophotonics is on its way to revolutionizing various applications in devices, fabrications, and information and communication systems. Promoting further exploration in the field, this book helps you understand the theory behind nanophotonics and how it can be applied to devices and systems.

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Ion Beams in Nanoscience and Technology

Product Description
Energetic ion beam irradiation is the basis of a wide plethora of powerful research- and fabrication-techniques for materials characterisation and processing on a nanometre scale. Materials with tailored optical, magnetic and electrical properties can be fabricated by synthesis of nanocrystals by ion implantation, focused ion beams can be used to machine away and deposit material on a scale of nanometres and the scattering of energetic ions is a unique and quantitative tool for process development in high speed electronics and 3-D nanostructures with extreme aspect radios for tissue engineering and nano-fluidics lab-on-a-chip may be machined using proton beams. This book will benefit practitioners, researchers and graduate students working in the field of ion beams and application and more generally everyone concerned with the broad field of nanoscience and technology.

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